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Model 4145A Semiconductor Parameter Analyzer – xDevs.com

This manual may contain references to HP or Hewlett-Packard. Please note that. Hewlett-Packard’s former test and measurement, semiconductor products and.

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HP4145A Semiconductor Parameter Analyzer.

A semiconductor parameter analyzer (SPA) contains voltage sources, current sources, voltage monitors, and current monitors that can be programmed via a menu- …

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4145A Agilent Semiconductor Parameter Analyzer Used

The Agilent 4145A semiconductor parameter analyzer is a fully automatic, high performance, programmable test instrument designed to measure, analyze, and …

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Full text of “HP 4145A Semiconductor Parameter Analyzer …

The Hewlett-Packard Model 4145A Semiconductor Parameter Analyzer is a fully automatic, high performance, programmable test instrument designed to measure, …

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The HP 4145A semiconductor parameter analyzer is a fully automatic, high performance, programmable test instrument designed to measure, analyze, and …

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Agilent-HP-4145A-Datasheet.pdf

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Keysight 4145A Semiconductor Parameter Analyz… | ATEC

Keysight 4145A Semiconductor Parameter Analyzers were previously manufactured by Agilent Technologies. Options: HP 4085M SWitching Matrix (does not include …

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4145A Agilent Semiconductor Parameter Analyzer

The 4145A is a Semiconductor Parameter Analyzer from Agilent. Semiconductor parameter analyzers are all-in-one tools used for a wide range of measurement capabilities. Semiconductor parameter analyzers can measure and analyze electrical characterizations of many types of electronic devices, materials, active or passive components, semiconductors, or any other kind of electronic equipment. Engineers use this piece of test equipment for the monitoring of current and voltage responses in different types of devices.

Full text of “HP 4145A Semiconductor Parameter Analyzer Operation And Service Manual”

Full text of “HP 4145A Semiconductor Parameter Analyzer Operation And Service Manual”

WLjm HEWLETT mL/ia Packard OPERATION AND SERVICE MANUAL MODEL 4145A SEMICONDUCTOR PARAMETER ANALYZER SERIAL NUMBERS This manual applies directly to instruments with serial numbers prefixed 2149J- and above. COPYRIGHT: YOKOGAWA-HEWLETT-PACKARD, LTD., 1982 9-1, TAKAKURA-CHO, HACHIOJI-SHI, TOKYO, JAPAN Printed: JAN. 1983 A, Manual Part No. 04145-90000 Microfiche Part No. 04145-90050 Table of Contents Model 4145A TABLE OF CONTENTS Section Title Page Section Title Page I GENERAL INFORMATION 1-1. Introduction . 1-1 3-37. Auto-Calibration . 3-27 1-4. Description ‘. 1-2 3-40. Display Pages . 3-28 1-11. Specifications . 1-3 3-42. Page Control . 3-28 1-13. Safety Considerations …. 1-3 3-45. MENU Page . 3-30 1-16. Instruments Covered by 3-47. CHANNEL DEFINITION Page . 3-30 Manual .. 1-3 3-49. C0URCE SETUP Page . 3-30 1-21. Options . 1-4 3-51 . MEAS & DISP MODE SETUP 1-23. Accessories Supplied . 1-4 Page . 3-30 1-25. Accessories Available – 1-4 3-53. GRAPHICS PLOT Page . 3-30 1-27. Warranty Limitation for 3-55. LIST DISPLAY Page . 3-30 Accessories . 1-4 3-57. MATRIX DISPLAY Page . 3-30 3-59. SCHM00 PLOT Page . 3-30 INSTALLATION 3-61 . AUTO SEQUENCE SETUP Page. 3-31 3-63. OUTPUT SEQUENCE SETUP 2-1. Introduction . 2-1 Page . ‘ 3-31 2-3. Initial Inspection . 2-1 3-65. USER FILE CATALOG Page .. 3-31 2-5. Preparation for Use . 2-1 3-67. OPERATION GUIDE Page …. 3-31 2-6. Power Requirements . 2-1 3-69. DIAGNOSTICS Page . 3-31 2-8. Line Voltage and Fuse 3-71. Softkey Prompt (SKP) …. 3-31 Selection . 2-1 3-73. System Messages . 3-31 2-10. Line Frequency Filter …. 2-1 3-75. Time Domain Measurement 2-12. Power Cable . 2-2 Setup . 3-74 2-16. Operating Environment – 2-2 3-77. DUT Connection . 3-76 2-19. Installation Instructions. 2-2 3-79. DUT Connection Using the 2-21. Installation of Options 16058A . 3-76 907, 908 and 909 . 2-2 3-81. DUT Connection Using the 2-23. Storage and Shipment . 2-4 Connector Plate . 3-80 2-24. Environment . 2-4 3-83. Floating Measurement _ 3-82 2-26. Packaging . 2-4 3-85. Guarding . 3-82 3-87. Applications Package …. 3-83 3-89. HP-IB Interface . 3-86 OPERATION 3-91. Connection to HP-IB . 3-86 3-93. HP-IB Status Indicators . 3-86 3-1 . Introduction . 3-1 3-95. LOCAL Key . 3-86 3-3. Panel Features . 3-2 3-97. HP-IB Control Switch …. 3-86 3-5. Flexible Disc Handling … 3-10 3-99. HP-IB Interface 3-7. CRT Display . 3-10 Capabilities . 3-87 3-10. Self Test . 3-12 3-101 . HP-IB Control Modes . 3-87 3-12. Error Messages/Error Codes 3-12 3-103. HP-GL Control of the CRT 3-87 3-14. Initial Control Setting .. 3-18 3-105. Remote Program Codes and 3-16. User-Area Filing Parameter Setting – 3-88 Operations . 3-18 3-107. HP-GL Commands . 3-97 3-18. Arithmetic Capabilities .. 3-19 3-109. Device Clear . 3-100 3-21. Source and Measurement 3-111. Data Output . 3-101 Channels . 3-21 3-113. Service Request Status 3-23. Stimulus/Measurement Byte . 3-102 Units (SMU) . 3-21 3-115. Programming Guide for 3-25. Voltage Sources (Vs) and 4145A . 3-104 Voltage Monitors (Vm) . 3-23 3-117. PLOT . 3-108 3-27. Compliance . 3-23 3-119. PRINT . 3-110 3-29. Sweep Measurement . 3-24 3-121. External Display . 3-111 3-33. Time Domain Measurement .. 3-26 3-123. Disc Copy . 3-112 3-35. Integration Time . 3-27 3-125. Head Cleaning . 3-113 ii Model 4145A Table of Contents TABLE OF CONTENTS Section Title Page 3-127. Protection againt Hazard¬ ous Voltage Exceeding ±42V . 3-114 3-129. PLOT/PRINT Operations Using HP-IB Controller 3-114 3-131. Measurement Ranges and Resolution . 3-116 3- 133. Resolution and Format for Displayed Data and Data Output . 3-118 IV PERFORMANCE TEST 4- 1, Introduction . 4-1 4-3. Equipment Required . 4-1 4-5. Test Record . 4-1 4-7. Calibration Cycle . 4-1 4-9. Graphics Display Unit Intensity and Focus Check . 4-2 4-10. Page and Key Function Check . 4-4 4-11. SMU Accuracy Test . 4-5 4-12. VS Accuracy Test . 4-19 4-13. VM Accuracy Test . 4-22 4-14. External CRT X-Y-Z Output Check . 4-25 4- 15. HP-IB Interface Test . 4-27 V ADJUSTMENT 5- 1. Introduction . 5-1 5-3. Safety Requirement . 5-1 5-7. Equipment-Required ……. 5-1 5-9. Adjustment Relationships . 5-1 5-11. Adjustment Locations . 5-1 5-13. Initial Operation Procedure . 5-3 5-15. Basic Operating Checks … 5-3 5-17. Top Cover Removal . 5-3 5-19. Bottom Cover Removal . 5-3 5-21. A3 Board Access . 5-3 5-23. Graphics Display Unit Intensity and Focus Check and Adjustment .. 5-6 5-24. DC Power Supply Adjustment 5-8 5-25. Sample Hold Switch AC Offset Adjustment . 5-11 5-26. Demultiplexer Noise Rejection Adjustment .. 5-13 5-27. D-A Converter Gain Adjustment . 5-16 5-28. A-D Converter Gain Adjustment . 5-18 5-29. VM Range Adjustment . 5-20 5-30. Mass Storage Unit Test … 5-23 5-32. Flexible-disc Drive Access 5-23 Section Title Page 5-34. Disc Check . 5-23 5-36. Flexible-disc Drive Checks and Adjustments . 5-23 5-38. Sure Flexible-disc Drive Checks and Adjustment . 5-23 5-40. MSU DIAGNOSTICS Mode . 5-24 5-43. MSU Read Test . 5-26 5-46. MSU Write Test . 5-28 5-49. MSU EXERCISER . 5-30 5-52. Drive Belt Tension Check and Adjustment… 5-32 5-53. Index Timing Check and Adjustment . 5-33 5-54. Track Alignment Check and Adjustment ‘. 5-34 5-55. Track Zero Switch Check and Adjustment . 5-38 5-56. Jitter Check and Adjustment.. 5-41 5-57. Index Detector Alignment Check and Adjustment .. 5-43 VI REPLACEABLE PARTS 6-1. Introduction .. 6-1 6-3. Abbreviations . 6-1 6-5. Replaceable Parts List … 6.-1 6-7. Ordering Information . 6-2 6-10. Direct Mail Order System . 6-2 VII MANUAL CHANGES 7-1. Introduction . 7-1 7- 3. Manual Changes . 7-1 VIII SERVICE 8- 1. Introduction . 8-1 8-3. Safety Considerations …. 8-1 8-5. Recommended Test Equipment 8-1 8-7. Troubleshooting . 8-1 8-9. Repair . 8-1- 8-11. Block Diagram Discussion . 8-2 8-13. Board Level Theory . 8-4 8-15. Troubleshooting Guide _ 8-6 8-17. Assembly Removal . 8-8 8-18. Assembly Locations . 8-8 8-20. A1 through A8 Board Removal 8-9 8-22. A13 through A16 Board Removal . 8-9 8-24. Front Panel Removal . 8-9 8-26. Display (1345A) Removal .. 8-10 8-28. Rear Assembly A Removal .. 8-11 8-30. All and A12 Board Removal. 8-11 8-32. Rear Assembly B Removal .. 8-12 8-34. FDD and A9 Board Removal . 8-13 8-36. A1 Graphic Display Control Board. 8-69 iii Table of Contents Model 4145A TABLE OF CONTENTS Sectior i Title Page Section Title Page 8-38. A2 Microprocessor 8-48. A10 Keyboard and Digital Control Board … … 8-72 Display Control Board … … 8-115 8-40. A3 SMU Control and A-D 8-50. All Switching Power Converter Board . … 8-78 Supply Board . … 8-120 8-42. A4 D-A Converter Board …. … 8-84 8-52. A13 SMU Power Source 8-44. A5 SMU Board . … 8-98 Board . … 8-129 8-46. A9 HP-IB and MSU 8-54. A16 Vs/Vm Board . … 8-138 Control Board . … 8-111 LIST OF TABLES Number Ti tl e Page Number Title Page 1-1. Specifications . 1-5 4-12. HP-IB Interface Test Program .. 4-29 1-2. Reference Data . 1-13 4-13. Controller Instructions and 1-3. Accessories Supplied . 1-16 Operator Response for HP-IB Interface Test Program . 4-33 4-14. Error Messages for HP-IB 3-1. 4145A Self Test . 3-12 Interface Test Program . 4-35 3-2. Error Messages . 3-13 3-3. Operational Error-Codes . 3-15 3-4. Self Test Error-Codes . 3-17 5-1. Adjustable Components – ….. 5-2 3-5. Arithmetic Operators . 3-19 5-2. Adjustment Requirements . 5-4 3-6. SMU Source Ranges . 3-22 5-3. Check Points and Limits . 5-10 3-7. Application Package Setups …. 3-83 5-4. Test Point/Trimmer Capacitor 3-8. HP-IB Interface Capabilities .. 3-87 Combination . 5-14 3-9. HP-GL Commands . 3-97 5-5. MSU DIAGNOSTICS Mode . 5-24 3-10. Recommended HP-IB Plotters …. 3-108 5-6. Message on MSU EXERCISER Page . 5-30 3-11. Recommended HP-IB Printers …. 3-110 5-7. MSU EXERCISER Softkey Prompts . 5-31 3-12. Recommended External Displays . 3-111 3-13. Number of Oupput/Sisplay Digits 3-118 6-1. List of Reference Designators 4-1. Recommended Test Equipment …. 4-A and Abbreviations . 6-1 4-2. Source Parameter Changes . 4-8 6-2. Manufacturers Codes . 6-2 4-3. Test Limits for Voltage Control 6-3. Replaceable Parts . 6-3 Accuracy Test . 4-8 4-4. Source Parameter Changes . 4-12 4-5. Test Limits for Voltage 7-1 . Manual Changes by Serial Measurement Accuracy Test .. 4-12 Number . 7-1 4-6. Source Parameter Changes . 4-15 4-7. Test Limits for Current Measurement Accuracy Test .. 4-15 8-1. Hardware-related Error Codes .. 8-6 4-8. Source Parameter Changes . 4-18 8-2. SMU Status Codes . 8-6 4-9. Test Limits for Current Control 8-3. Jumper Settings . 8-19 Accuracy Test . 4-18 8-4. List of Digital Section 4-10. Test Limits for SU Accuracy Troubleshooting Flow Diagrams 8-22 Test . 4-21 8-5. Program Locations . 8-76 4-11. Test Limits for MU Accuracy 8-6. Relationship between Current Test . 4-24 and Range Resistors . 8-103 8-7. V Monitor Amplifier Ranging … 8-104 iv CO CO CO Model 4145A List of Illustrations LIST OF ILLUSTRATIONS Number Title Page Number Title Page 1-1. Model 4145A and Accessories …. 1-1 1- 2. Serial Number Plate . 1-3 2- 1. Voltage and Fuse Selection . 2-2 2-2. Power Cable Supplied . 2-3 2- 3. Rack Mount Kit . 2-5 3- 1. Contents of Section III . 3-1 3-2. Front Panel Features . 3-2 3-3. Rear Panel Features . 3-8 3-4. Disc Installation and Removal .. 3-10 3-5. Useable Display Area . 3-11 3-6. Operator Adjustment . 3-11 3-7. Byte Size of Arithmetic Expressions . 3-20 3-8. Source and Measurement Channels of the 4145A . 3-21 3-9. Simplified Circuit Diagram of One of the Four SMUs . 3-21 3-10. Specifiable yoltage/Currerit Output . 3-22 -11. Simplified Circuit Diagram of ]ls 3-23 -12. Simplified Circuit Diagram of Vm 3-23 -13. Voltage/Current Output Specified by the COMPLIANCE . 3-23 3-14. Staircase Sweep Output . 3-24 3-15. Relationship Between VAR! and VAR2 . 3-25 3-16. Relationship Between VAR1 and VAR1′ . 3-26 3-17. Time Domain Measurement . 3-27 3-18. Page Control Keys . 3-28 3-19. Page Flow and the Relationship . 3-29 3-20. MENU Page . 3-32 3-21. CHANNEL DEFINITION Page . 3-34 3-22. SOURCE SETUP Page . 3-38 3-23. MEAS & DISP MODE SETUP Page …. 3-42 3-24. GRAPHICS PLOT Page . 3-48 3-25. LIST DISPLAY Page . 3-54 3-26. MATRIX DISPLAY Page . 3-57 3-27. SCHMOO PLOT Page . 3-59 3-28. AUTO SEQUENCE SETUP Page . 3-62 3-29. OUTPUT SEQUENCE SETUP Page . 3-66 3-30. 4145A FILE CATALOG Page . 3-67 3-31. OPERATION GUIDE Page . 3-70 3-32. DIAGNOSTICS Page . 3-71 3-33. Time Domain Measurement Setup .. 3-74 3-34. DUT Connection Using the 16058A. 3-76 3-35. DUT Connection Using the Connector Plate . 3-80 3-36. Example of Guarding . 3-82 3-37. Connection Examples for Application Package . 3-85 3-38. HP-IB Control Switch . 3-86 3-39. Remote Program Codes and Parameter Setting . 3-88 3-40. Data Output Format . 3-100 3-41. Status Byte for the 4145A . 3-102 3-42. Sample Program 1 . 3-105 3-43. Sample Program 2 . 3-107 3-44. Plot Function . 3-108 3-45. Print Function . 3-110 3-46. External Display . 3-111 3-47. Disc Copy . 3-112 3-48. Head Cleaning . 3-113 3-49. Programs for HP-IB controlled PLOT Operations . 3-115 3-50. Measurement Ranges and Resolution . 3-116 3-51. Display/Output Format . 3-119 4-1. Test Pattern for GDU . 4-2 4-2. GDU Connector Location . 4-3 4-3. Display for Key Function Check. 4-4 4-4. Voltage Control Accuracy Test Setup . 4-5 4-5. Measurement Setup . 4-6 4-6. Voltage Measurement Accuracy Test Setup . 4-9 4-7. Measurement Setup . 4-10 4-8. Measurement Setup . 4-13 4-9. Measurement Setup . 4-16 4-10. SU Accuracy Test Setup . 4-19 4-11. Measurement Setup . 4-21 4-12. MU Accuracy Test Setup . 4-22 4-13. Measurement Setup . 4-23 4-14. External CRT X-Y-Z Output Check Setup .. 4-25 4-15. Scope Displays of X-Y-Z Output (Example) . 4-26 4-16. HP-IB Interface Test Setup …. 4-27 4-17. Program Listing of HP-IB Interface Test . 4-30 5-1. Test Pattern for GDU . 5-6 5-2. INTENSITY and FOCUS Locations . 5-6 5-3. Connector Location . 5-7 5-4. DC Power Supply Adjustment Setup . 5-8 5-5. A11R17 Adjustment . 5-9 5-6. A5J1 Check . 5-10 5-7. Check Point Locations . 5-10 5-8. Sample Hold Switch AC Offset Adjustment Setup . 5-11 5-9. AC Offset Adjustment . 5-12 5-10. Check/Adjustment Point Locations . 5-12 v List of Illustrations Model 4145A LIST OF ILLUSTRATIONS Number Title Page 5-14. D-A Converter Gain Adjustment Setup . 5-16 5-15. Check/Adjustment Point Locations . 5-17 5-16. Results from LED Annunciators .. 5-18 5-17. Check/Adjustment Point Locations . 5-19 5-18. Vm Range Adjustment Setup . 5-20 5-19. Test Point Locations . 5-22 5-20. Flexible-disc Drive Access . 5-23 5-21. Component Locations for MSU DIAGNOSTICS Mode Setting …. 5-25 5-22. CRT Display of MSU DIAGNOSTICS Page . 5-25 5-23. CRT Display of MSU Read Test … 5-26 5-24. CRT Display of MSU Write Test .. 5-28 5-25. CRT Display fo MSU EXERCISER Page . 5-30 5-26. Drive Belt Tension Check and Adjustment Setup . 5-32 5-27. Index Timing Checks and Adjustment . 5-33 5-28. R47 Location . 5-33 5-29. Track Alignment Check and Adjustment . 5-34 5-30. Scope Display of Bursts . 5-35 5-31. Check/Adjustment Point Locations 5-37 5-32. Track Zero Switch and Adjustment Setup . 5-38 5-33. Scope Display of Track Zero Switch Switching . 5-39 5-34. Check/Adjustment Point Locations 5-40 5-35. Jitter Check and Adjustment Setup . 5-41 5-36. Scope Display of Jitter . 5-42 5-37. Check/Adjustment Point Locations 5-42 5-38. Index Detector Alignment Check and Adjustment Setup . 5-43 5-39. Index Detector Alignment Gap … 5-44 5-40. Check/Adjustment Point Locations 5-45 6-1. Major Mechanical Parts (Exploded View) . 6-29 Number Title Page 8-1. Four Major Sections of the 4145A 8-3 8-2. Overall Block Diagram . 8-5 8-3. Assembly Level Trouble Isolation Flow Diagram . 8-7 8-4. Assembly Locations . 8-8 8-5. Front Panel Removal . 8-9 8-6. 1345A Removal . 8-10 8-7. Rear Assembly A Removal . 8-11 8-8. All and A12 Board Removal . 8-12 8-9. Rear Assembly B Removal . 8-12 8-10. A19 Board Assembly . 8-13 8-11. FDD and A9 Board Removal . 8-13 8-12. Flow Diagram Notes . 8-14 8-13. Signature Analysis . 8-21 8-14. A1 Board Troubleshooting Flow Diagram . 8-25 8-15. A2 Board Troubleshooting Folw Diagram . 8-31 8-16. A3 Board Troubleshooting Flow Diagram . 8-43 8-17. A4 Board Troubleshooting Folw Diagram . 8-53 8-18. A9 Board Troubleshooting Flow Diagram . 8-59 8-19. A10 Board Troubleshooting Flow Diagram . 8-65 8-20. Schematic Diagram Note . 8-68 8-21. Block Diagram of A1 Board . 8-69 8-22. A1 Graphic Display Control Board Assembly Component Locations. 8-70 8-23. A1 Graphic Display Control Board Assembly Schematic Diagram .. 8-71 8-24. Block Diagram of the A2 Board .. 8-72 8-25. A2 Microprocessor Digital Control Board Assembly Component Locations . 8-74 8-26. A2 Microprocessor Digital Control Board Assembly Schematic Diagram . 8-75 8-27. Block Diagram of the. A3 Board .. 8-78 8-28. A3 SMU Control and A-D Converter Board Assembly Component Locations . 8-80 8-29. A3 SMU Control and A-D Converter Board Assembly Schematic Diagram . 8-81 8-30. Block Diagram of A4 Board . 8-84 8-31. I-V Converter Output . 8-85 8-32. Analog Switch . 8-85 8-33. A4 D-A Converter Board Assembly Component Locations . 8-86 8-34. A4 D-A Converter Board Assembly Schematic Diagram . 8-87 8-35. A5 Board Troubleshooting Flow Diagram. 8-88 vi List of Illustrations Model 4145A i LIST OF ILLUSTRATIONS Number Title Page 8-36. Self-Test Waveform . 8-97 8-37. SMU Board Block Diagram . 8-98 8-38. SMU V Mode Operation . 8-99 8-39. SMU I Mode Operation . 8-99 8-40. Current Compliance in V Mode .. 8-100 8-41. V Error Amplifier . 8-100 8-42. Three Control Modes . 8-101 8-43. Example of Diode Feedback . 8-102 8-44. Power Amplifier Output Stage .. 8-102 8-45. Range Resistors . 8-103 8-46. Range Resistor Circuit . 8-104 8-47. A5 SMU Board Assembly Component Locations . 8-106 8-48. A5 SMU Board Assembly Schematic Diagram . 8-107 8-49. A9 HP-IB and MSU Control Board Assembly Component Locations 8-112 8-50. A9 HP-IB and MSU Control Board Assembly Schematic Diagram . 8-113 8-51. Block Diagram of Key Control .. 8-115 8-52. A10 Keyboard and Display Board Assembly Component Locations 8-116 8-53. A10 Keyboard and Display Board Assembly Component Locations 8-117 8-54. All Board Troubleshooting Flow Diagram . 8-118 8-55. Rectifier Circuit . 8-120 8-56. Switching Circuit . 8-120 8-57. Power Loss Detection Circuit .. 8-121 8-58. All Switching Power Supply Board Assembly Component Locations . 8-122 8-59. All Switching Power Supply Board Assembly Schematic Diagram . 8-123 8-60. A12 Board Troubleshooting Flow Diagram . 8-124 8-61. A12 DC Power Supply Board Assembly Component Locations 8-126 8-62. A12 DC Power Supply Board Assembly Schematic Diagram . 8-127 8-63. A13 Board Troubleshooting Folw Diagram . 8-128 8-64. Voltage Change Sequence .8-129 8-65. A13 SMU Power Source Board Assembly Component Locations.8-130 8-66. A13 SMU Power Source Board Assembly Schematic Diagram . 8-131 8-67. A15 Board Troubleshooting Flow Diagram . 8-132 8-68. A15 Floating Power Supply Board Assembly Component Locations 8-68 Number Title Page 8-69. A15 Floating Power Supply Board Assembly Schematic Diagram . 8-69 8-70. A16 Board Troubleshooting Flow Diagram . 8-136 8-71. Vs Block Diagram . 8-138 8-72. Vm Block Diagram . 8-138 8-73. A16 Vs/Vm Board Assembly Component Locations . 8-140 8-74. A16 Vs/Vm Board Assembly Schematic Diagram . 8-141 vii Model 4145A SECTION I SUCTION 1 GENERAL INFORMATION 1-1. INTRODUCTION 1-2. This operation and service manual contains the information required to install, operate, test, adjust, and service the Hewlett-Packard Model 4145A Semiconductor Parameter Analyzer. Figure 1-1 shows the instrument and supplied accessories. This section covers specifications, instrument identification, description, options, accessories, and other basic information. 1-3. Listed on the title page of this manual is a microfiche part number that can be used to order 4×6 inch microfilm transparencies of the manual. Each microfiche contains up to 60 photo-duplicates of the manual pages. The microfiche package also includes the latest manual changes supplement as well as all pertinent service notes. To order an additional manual, use the part number listed on the title page of this manual. 16058A 04145-61100 (order the 16261A Software Disc Set when extra discs are 04145-61622 .s’ 04145-61623 IP > nnnr.i jj t: n ifii 04145-60001 V: 04145-61630 Figure 1-1. Model 4145A and Accessories. 1-1 SECTION I Model 4145A 1-4. DESCRIPTION 1-5. The Hewlett-Packard Model 4145A Semiconductor Parameter Analyzer is a fully automatic, high performance, programmable test instrument designed to measure, analyze, and graphically display the DC characteristics of a wide range of semiconductor devices, such as diodes, bipolar transistors, field-effect transistors, wafers, ICs, etc. Main applications include computer-aided design (CAD) of ICs, new device evaluation, materials evaluation, component selection for circuit design, incoming/outgoing inspection, semiconductor process control, quality control, and quality assurance. It is equipped with four programmable stimulus/measurement units (SMU), two programmable voltage source units (Vs), two voltage monitor units (Vm), a fully interactive graphics display, removable flexible-disc storage, softkeys, full arithmetic keyboard, and HP-IB. And it can be used on the bench or as part of a complete measurement system in the laboratory or on the production line. 1-6. For device stimulation and characteristics measurement, the 4145A has eight channels. Channels 1 through 4 are stimulus/measurement units (SMU); channels 5 and 6 are voltage source units (Vs); and channels 7 and 8 are voltage monitor units (Vm). Each SMU channel has three modes of operation: voltage souree/current monitor (V), current source/voltage monitor (I), and common (COM). Source voltage and source current can be held constant or swept linearly or logarithmically. When used as a voltage source/current monitor (V mode), each SMU can be programmed to output DC voltages from OV to ±100V over three ranges—OV to ±19.999V, + 20V to ±39.998V, and + 40V to ±100V—with a resolution of lmV, 2mV, and 5mV, respectively. When used as a current source/voltage monitor (I mode), each SMU can be programmed to output currents from ±lpA to ± 100mA over nine ranges, with a resolution of IpA max. (current measurement resolution is 50fA max.), depending on the current range. Current through the sample in V mode and voltage across the sample in I mode can be limited to prevent damage to the sample. The two Vs channels are programmable voltage sources. Output voltage can be held constant or linearly or logarithmically swept from OV to + 20V with lmV resolution. The voltage sources are used when many bias and voltage sources are required. Of the six source channels (four SMUs, two Vs), any combination of three can be automatically swept in a linear or logarithmic staircase manner within the range of each channel. Hold times from 0 to 650 seconds and delay times from 0 to 6.5 seconds can be programmed. In a multi-channel sweep setup, one channel functions as the main sweep channel. One of the other channels can be swept synchronously with the main channel, while one other channel can be swept subordinately to the main channel. SMUs not swept can be used as constant current or constant voltage sources. The two Vm channels are used to measure voltages up to ±20V. 1-7. Measurement results, measurement setups, operator prompts, error messages, and diagnostics are displayed on a fully interactive, microprocessor based graphics display. Measurement results can be displayed in one of four modes ; graphic, list, matrix, and schmoo. Front Panel softkeys provide a wide range of automatic display control functions, such as AUTO SCALE, STORE, RECALL, CURSOR, MARKER, vertical and horizontal ZOOM, LINE (two), GRAD, 1/GRAD, X intercept, Y intercept, and INTERPOLATE. Softkeys are used in all phases of instrument operation—from measurement setup to measurement analysis—and make overall instrument operation quick and easy. By pressing the PLOT key or PRINT key, the presently displayed screen, whether a measurement result or measurement setup, can be dumped directly onto an HP-IB compatible printer/plotter, providing clear, inexpensive hard copies. The plot area is user selectable within the limits of the printer/plotter, and if a multi-pen plotter is used, multi-color plots can be made automatically. All PLOT and PRINT operations are done automatically, without a controller. Also, the 4145A’s display is equipped with X-Y-Z outputs to allow connection of a large-screen graphics display. The 4145A is fluent in HP-GL (Hewlett- Packard Graphics Language), permitting external control of its display via the HP-IB. Cursor and marker positioning is user controllable via the front panel, and X-Y1-Y2 coordinates are digitally displayed on the CRT. 1-2 Model 4145A SECTION I 1-8. The 4145A is equipped with a flexible-disc drive unit that accommodates a single-sided, single-density, 13.3cm (5.25 in.), 92K byte disc. One cleaning disc and five work-discs—each containing the necessary operating system software, four general purpose measurement programs, and 36.6K bytes of user area—are furnished with the 4145A. Up to 47 measurement setup programs or 11 sets of measurement data, plus auto sequence programs, can be stored (SAVE) in the user area and recalled (GET) later. Additional discs can be purchased to increase storage capability, and the entire user area of each disc can be quickly copied. 1-9. All instrument functions are handled by a high speed microprocessor, under the control of the operating system software stored on each furnished flexible disc. Measurement setup, display mode selection, graphic scaling, diagnostics, operation guide, menu, and catalog are arranged as individual display pages. Paging is controlled by the MENU, PREV, and NEXT keys. Instructions, softkey labels, and error messages and codes are displayed on each page. Also, the 4145A is remotely controllable via the HP-IB and the 4145A’s display can be used as an independent display via the HP-IB. 1-10. Furnished with the 4145A is the 16058A, a specially designed shielded test fixture which connects to the 4145A’s rear panel. Eight different interchangeable DUT boards are provided, allowing measurement of diodes; 3-terminal and 4-terminal transistors; 8-pin, 10-pin, and 12-pin devices; and 18-pin and 24-pin DIP ICs. The 16058A is equipped with a light-shielded lid to allow stable measurement of light-sensitive devices, such as photo diodes, photo transistors, and photo resistors. Also, to insure operator safety when potentially dangerous voltages are applied to a sample, a warning will be displayed on the 4145A if the test fixture lid is open and measurement will not be made until the lid is closed. For user-fabricated test fixtures and jigs, a special connector, four 3-meter triaxial cables, and four 3-meter coaxial cables are also furnished. 1-11. SPECIFICATIONS 1-12. Complete specifications of the Model 4145A Semiconductor Parameter Analyzer are given in Table 1-1. These specifications are the performance standards or limits against which the instrument is tested. The test procedures for the specifications are covered in Section IV, Performance Tests. Table 1-2 lists Reference Data. Reference Data are not specifications but are typical characteristics included as additional information for the operator. When the 4145A Semiconductor Parameter Analyzer is shipped from the factory, it meets the specifications listed in Table 1-1. 1-13. SAFETY CONSIDERATIONS 1-14. The Model 4145A Semiconductor Parameter Analyzer has been designed to conform to the safety requirements of an 1EC (International Electromechanical Committee) Safety Class I instrument and is shipped from the factory in a safe condition. 1-15. This operation and service manual contains information, cautions, and warnings which must be followed by the user to ensure safe operation and to maintain the instrument in a safe condition. 1-16. INSTRUMENTS COVERED BY MANUAL 1-17. Hewlett-Packard uses a two-section nine character serial number which is stamped on the serial number plate (Figure 1-2) attached to the instrument’s rear-panel. The first four digits and the letter are the serial prefix and the last five digits are the suffix. The letter placed between the two sections identifies the country where the instrument was manufactured. The prefix is the same for all identical instruments; it changes only when a change is made to the instrument. The suffix, however, is assigned sequentially and is different for each instrument. The contents of this manual apply to instruments with the serial number prefix(es) listed under SERIAL NUMBERS on the title page. .SERIAL- NO. YOKCSAWA HEWLETT PACKARD TOKYO JAPAN __ ; P Figure 1-2. Serial Number Plate. 1-3 SECTION I Model 4145A 1-18. An instrument manufactured after the printing of this manual may have a serial number prefix that is not listed on the title page. This unlisted serial number prefix indicates the instrument is different from those described in this manual. The manual for this new instrument may be accompanied by a yellow Manual Changes supplement or have a different manual part number. This supplement contains “change information” that explains how to adapt the manual to the newer instrument. 1-19. In addition to change information, the supplement may contain information for correcting errors (called Errata) in the manual. To keep this manual as current and accurate as possible, Hewlett-Packard recommends that you periodically request the latest Manual Changes supplement. The supplement for this manual is identified with the manual print date and part number, both of which appear on the manual’s title page. Complimentary copies of the supplement are available from Hewlett- Packard. If the serial prefix or number of an instrument is lower than that on the title page of this manual, see Section VII, Manual Changes. 1-20. For information concerning a serial number prefix that is not listed on the title page or in the Manual Change supplement, contact the nearest Hewlett-Packard office. 1-21. OPTIONS 1-22. Options are modifications to the standard instrument that implement the user’s special requirements for minor functional changes. The 4145A has four options : Option 907 : Front Handle Kit. Furnishes Carrying handles for both ends of front-panel. Option 908 : Rack Frange Kit. Furnishes flanges for rack mounting for both ends of front-panel. Option 909 : Rack Flange and Front Handle Kit. Furnishes both front handles and rack flanges for instrument. Option 910 : An extra copy of the Operation and Service Manual. Installation procedures for these options are given in Section II. 1-23. ACCESSORIES SUPPLIED 1-24. The Model 4145 A Semiconductor Parameter Analyzer, along with its furnished accessories, is shown in Figure 1-1. The Additionally, a spare fuse (HP Part No. 2110-0015 or 21 10-0305) and an Operation and Service Manual (HP Part No. 04145-90000) are furnished with the 4145A. 1-25. ACCESSORIES AVAILABLE 1-26. The Model 16261A Software Disc Set, containing five software discs, is available when extra discs are required. 1-27. Warranty Limitation for Accessories 1-28. The Personality Board (P/N: 16058-60003) and eight Boards (P/N: 16058-60004 through 16058-60011) furnished with the 16058A Test Fixture are warranted against defects in material and workmanship for a period of three months from the date of delivery. During the warranty period, Hewlett-Packard Company will, at its option, either repair or replace components which prove to be defective. This warranty does not apply to defects resulting from improper use or inadequate maintenance. 1-4 Model 4145A SECTION I Table 1-1. Specifications (Sheet 1 of 8) * Specifications listed below are for the 4145A only. For 16058A specifications, refer to the 16058A Operation Note. GENERAL INFORMATION Basic Functions : Measures the DC current through voltage-biased devices and the DC voltage across current-biased devices; Arithmetic calculation; Displays measurement results and calculation results on a built-in CRT display; graphics analysis capabilities; storage and recall of measurement setups, measurement data, and auto-sequence programs. Source and Measurement Units : Stimulus/Measurement Units (SMU) : Four SMU channels. Each SMU can be programmed to function as a variable or constant DC voltage source/current monitor or as a variable or constant DC current source/voltage monitor. Voltage Sources (Vs) : Two Vs channels. Each Vs can be programmed to function as a variable or constant DC voltage source. Voltage Monitors (Vm) : Two Vm channels. Each Vm can measure DC voltages up to + 20V. SOURCE/MEASUREMENT FUNCTIONS Measurement and output accuracies are specified at 23°+5°C after the instrument has been allowed to warm up for at least 40 minutes, with AUTO CAL set to ON, INTEG TIME set to SHORT and referenced to SMU common. Specified accuracy doubles for operation between 10 ° C and 40 ° C. Stimulus/Measurements Units (SMU) : Four SMU channels. Each SMU measures current when operating as a voltage source, or measures voltage when operating as a current source. Source and measurement ranges, resolution, and accuracy specifications are given in the tables below. Accuracy specifications in the below tables are given as ±n96 of specified output or measured value, ±n% of range value. lo is output current (I), Vo is output voltage (V). Voltage Range Resolution Accuracy Max. Current +20V lmV 100mA +40V 2mV 0.1%+0.05%+0.4fi*Io 50mA +100V 5mV 20mA 1-5 SECTION I Model 4145A Table 1-1. Specifications (Sheet 2 of 8) Current Range Resolution Accuracy Max. Voltage +100mA 10 Op A 0.3%+(0.1+0.2*Vo/100)% 20V (>50mA) 40V (>20mA) 100V (2i20inA) ±10mA lOpA +1000pA IpA ±100pA lOOnA ±10pA lOnA +1000nA InA 0.5%+(0.1+0.2*Vo/100)% ±100nA lOOpA ±10nA lOpA 1%+ C 0.1+0.2*Vo/100)%+SpA ±1000pA IpA Setting Resolution : Voltage, 4-1/2 digits (lmV max.); Current, 4 digits (IpA max.). Measurement Resolution : Voltage, 4-1/2 digits (lmV max.); Current, 4 digits (50f A max.). Ranging: Automatic. Current/Voltage Limiting (Compliance): Current output from an SMU operating as a voltage source and voltage output from an SMU operating as a current source can be limited. Compliance Range : Current, 50pA to maximum allowable output current of each voltage range; Voltage, OV to maximum allowable output voltage of each current range. Accuracy: Current compliance, accuracy of current source+1% of range +10pA; Voltage compliance, accuracy of voltage source. Residual Resistance (Voltage Source/Current Measurement Mode): 0.451. Input Resistance (Current Source/Voltage Measurement Mode): S10 12 fi. Capacitive Load : < 1000pF. 1-6 Model 4145A SECTION I Table 1-1. Specifications (Sheet 3 of 8) Voltage Sources (Vs) : Two Vs channels. Each Vs can be programmed to function as a variable or constant DC voltage source. Output ranges, resolution, and accuracy specifications are given in the table below. Output Voltage Range Resolution Accuracy Max. Output Current +20V lmV 0.5% of setting +10mV 10mA Output Impedance : Less than 0.2S1 Capacitive Load : 5 lOOOpF Voltage Monitors (Vm) : Two Vm channels. Output ranges, resolution, and accuracy specifications are given in the table below. Measurement Voltage Range Resolution Accuracy ±2V lOOyV 0.5% of reading + lOmV +20V lmV 0.2% of reading + lOmV Input Impedance : lMfi±l% Capacitance in Parallel with Output : 150pF + 10% SECTION I Model 4145A __ Table 1-1. Specifications (Sheet 4 of 8) SPECIFICATIONS COMMON TO ALL CHANNELS Maximum Withstand Voltage : 100V (SMU, guard terminal, Vs, and Vm) Maximum Voltage Between Common and GND : Less than ±42V. Source Modes (SMUs Only) : V (voltage souree/eurrent monitor), I (current source/voltage monitor), and COM*. Source Functions (SMUs Only): VAR1, staircase sweep; VAR1', synchronous (VARl) staircase sweep; VAR2, subordinate (VAR1) staircase sweep; CONST, constant source (voltage or current). * : In COM mode, output voltage is OV and compliance is 105mA. Voltage/Current Sweep : Output from each SMU (voltage or current) and each Vs (voltage) can be swept by assigning source function VAR1, VARl', or VAR2. Max. Number of Steps : 512 in single-sweep measurements, up to 575 in multi-sweep measurements. VARl : Main sweep. Linear or logarithmic sweep is selectable. Linear Sweep : Staircase sweep in accordance with the user specified START, STOP, and STEP values. Log Sweep : Staircase sweep in accordance with the user specified START and STOP values and selected LOG step (10, 25, or 50 points per decade). VAR2 : Subordinate linear staircase sweep in accordance with the user speci¬ fied START, STEP, an NO. OF STEPS values. VAR2 source channel output is incremeneted one STEP each time the VARl source channel completes one sweep. VARl' : Staircase sweep synchronized with the VARl sweep. Sweep is made with a user specified, fixed ratio or offset value. VARl' output is calculated as : VARl' = a x VARl (fixed ratio) VARl 1 = b + VARl (fixed offset) where "a" is the user-specified ratio (from +0.01 to ±10) and "b" is the user-specified offset value. Ratio and offset must be such that the VARl' source channel does not exceed its maximum output limit. HOLD TIME : 0 to 650 seconds, 10ms resolution (max.). Accuracy is ±0.5%+9ms. DELAY TIME : 0 to 6.5 seconds, 1ms resolution. Accuracy is ±0.1%+5xN for GRAPHICS and SCHMOO plots and ±0.1% + 10xN for LIST and MATRIX displays. Where N is the number of measurement channels used in the measurement. Output Sequence : The order in which the source channels begin output is fully programmable. Measurement Modes: SINGLE, REPEAT, APPEND Integration Time (at each measurement point) : SHORT, 3.6ms; MED, 20ms at 50Hz line frequency, 16.7ms at 60Hz line frequency; LONG, 16 times MED. 1-8 Model 4145A SECTION I Table 1-1. Specifications (Sheet 5 of 8) DISPLAY FUNCTIONS Display : CRT. Electrostatic focus and deflection, post accelerated. Alu¬ minized P-31 phosphor. Screen Size : 16cm (6.25in) diagonal. Screen Resolution : 2048 x 2048 points. Display Characters and Symbols : Upper-case alphabetic characters, numerics, comma, ( , ), @, ft, ° (deg), ", %, # , q, k, e, m, u, n, p, , A . All are entered from the front panel. Display Modes : GRAPHICS, LIST, MATRIX, SCHMOO, and TIME DOMAIN. GRAPHICS Display : Two-axes (X-Y) or three-axes (Y-Yi-Y 2 ) plot of measured parameters and USER FUNCTION calculations. LIST Display : Used in conjunction with VAR1 sweep. Up to six measure¬ ment parameters and USER FUNCTION results can be displayed for each step of the VAR1 source channel. MATRIX Display : Used in conjunction with VAR1 and VAR2 sweeps. Up to six columns of sweep-dependent measurement results or USER FUNCTION results can be displayed. SCHMOO Display : Used in conjunction with VAR1 and VAR2 sweeps. Sweep-dependent measurement results or calculation results are displayed on an X-Y-Z graph. TIME DOMAIN Display : Measurement and calculation results are displayed on a two-axes (X-Y) or three-axes (X-Yj ~Y Z ) graph as a function of time. VAR1 sweep is replaced by time. Parameters : Initial Wait Time, 0 to 100 seconds (10ms resolution); Measurement Interval, 10ms to 10 seconds (10ms resolution); Number of Readings, 512. 1-9 SECTION I Model 4145A Table 1-1. Specifications (Sheet 6 of 8) ARITHMETIC AND ANALYSIS FUNCTIONS Arithmetic Functions : Arithmetic expressions can be entered and executed directly from the front panel. Results are displayed on the CRT. Arithmetic Operators : +, *, /, , EXP (Napierian constant), LOG (common log), LN (natural log), ** (exponentiation), ABS (absolute), EEX (scientific notation), and A (differential calculation). Keyboard Operation : Arithmetic expressions are executed by pressing the EXECUTE key. Results are displayed on the CRT. USER FUNCTION : Up to two USER FUNCTION can be defined as arith¬ metic expressions. USER FUNCTIONS are executed during measurement and the results are displayed with measurement results. Physical Constants : Three commonly used physical constants are perma¬ nently stored in memory. The stored value of each constant has seven-digit accuracy but only the five most significant digits are displayed. q: Electron Charge, 1.602189xl0 -19 C k: Boltzmann's Constant, 1.380662x10 -23 J/° K e : Dielectric Constant of vacuum, 8.854185x10 _lz F/m. Engineering Units : m (10‘ 3 ), y (10 -5 ), n <10 -9 ), p (10 -12 ) Analysis Functions : t Overlay Graph Comparison : A GRAPHIC plot can be stored and later recalled to obtain an overlay comparison of two measurements. A SCHMOO plot can also be stored, but when the RECALL key is pressed, only the stored plot is displayed. Pressing RECALL a second time redisplays the previous plot. Only one set of data can be stored and scaling information is not included. Auto Retrieve Function : Measurement data obtained in any display mode is automatically redisplayed whenever the display mode is changed. However, when the value of a measurement setup parameter is changed, all measurement data is cleared. MARKER : On a GRAPHICS plot, the MARKER can be moved along a plotted curve or line. The X, Y x , and Y 2 coordinates at the MARKER location are digitally displayed on the CRT. INTERPOLATE : Allows positioning of the MARKER between two measurement points. The X, Y x , and Y 2 coordinates at the MARKER location are estimated and digitally displayed on the CRT. CURSOR : On a GRAPHICS plot, the CURSOR is two intersecting and perpendicular lines which can be positioned at any point on the graph. There are two GRAPHICS cursors : LONG and SHORT. The X, Y 1} and Y 2 coordinates at the CURSOR location are digitally displayed on the CRT. On a SCHMOO plot the CURSOR highlights the symbol at a measurement point and only the Z-axis value is digitally displayed on the CRT. \ On LIST and MATRIX displays the CURSOR is a moveable pointer (►). -10 Model 4145A SECTION I Table 1-1. Specifications (Sheet 7 of 8) AUTO SCALE : GRAPHIC plots can be automatically rescaled after meas- surement, providing optimum display of measurement results. ZOOM Function (■*••*, | , j ) : Used in conjunction with the CURSOR on GRAPHIC plots. Expands (■*■•*, |) or contracts (-»-*-, j ) the graph in the indicated direction and in reference to the CURSOR location. MOVE WINDOW : Repositions the LONG or SHORT CURSOR to the exact center of the plot area and moves displayed plots in reference to the CURSOR. LINE : Draws a straight line between two moveable cursors. X and Y axes intercepts are digitally displayed, as are the line gradient (GRAD) and gradient reciprocal (l/GRAD) values. MASUREMENT/DISPLAY SETUP AND STORAGE FUNCTIONS Measurement/Display Setup : Interactive filHn-the-blank programming of channel definitions, source outputs, and measurement/display modes. Measurement Setup Storage : The existing measurement setup can be stored in the user-area on the flexible disc and recalled later by using the SAVE and GET keys, respectively. Measurement Data Storage : The existing measurement results can be stored in the user-area on the flexible disc and recalled later by using the SAVE and GET key, respectively. Auto-Sequence Program : A series of different measurements can be programmed for automatic execution. The maximum number of program steps is 24, and useable commands are GET, SINGLE, SAVE D, PLOT, PRINT, PAUSE, WAIT, and PAGE. Storage Medium : 5.25 in. single-sided, single-density, soft-sectored mini flex¬ ible disc. User-Area : 92K bytes. Number of User Records : 131 Record Allocation : Measurement setup (file type P), 3 records; Measurement data (file type D), 12 records; Auto-sequence program (file type S), 1 record. 1-11 SECTION I Model 4145A Table 1-1. Specifications (Sheet 8 of 8) GENERAL SPECIFICATIONS Data Input/Output : External CRT Analog Output : From 0 to +1 Vdc, X and Y outputs (in series with approx. 330Q) Z output (in series with approx. 240f2), via rear panel BNC connectors. Frequency Bandwidth, DC - 2MHz. External Plotter/Printer Output : Measurement data and all data appear¬ ing on the CRT may be output via the HP-IB to an HP plotter/printer operated in the LISTEN ONLY Mode. Output is initiated using the PLOT or PRINT key. HP-GL Control : The CRT of the 4145A may be program controlled in the Graphics Display Mode via an HP-IB compatible Controller. HP-IB and Remote-Control Functions : The 4145A may be interfaced to any HP controller or other instrument having HP-IB interface capability. (HP-IB is Hewlett-Packard's implementation of IEEE-488 and ANSI-MC.1.1 standards.) Self-Test Function : At power ON, the 4145 A automatically verifies its own operational status. HP-IB and DIAGNOSTICS page allow Self-Test to be performed at any time. Operating Temperature Range: 10 ° C to +40 ° C; <70% RH(40°C) Permissible Temperature Change: 16058-60009: Socket Board with an 8-pin socket. 16058-60010: Socket Board with a 10-pin socket. 16058-60011: Socket Board with a 12-pin socket. SECTION I Model 4145A Table 1-3. Accessories Supplied (Sheet 3 of 5) Dimension of Socket (Unit in mm) Cable length : Approx. 115 Cable length : Approx. 115 Cable length : Approx. 115 HP P/N and Description 16058-61600: Connection Cable (large-to-Small) used for interconnecting the Personality Board to the Socket Board. Twelve cables are furnished. 16058-61601: Connection Cable (small-to-small) used for interconnecting the Connection Switch to the Socket Board. Eight cables are furnished. 16058-61602: Miniature Clip Lead used for direct connection to DUT. Eight leads are furnished. 16058-60100: Carrying-case for all 16058A accessories. Configuration Description Connector Plate (04145-60001): Connector Plate for measurements made without the 16058A. For example, direct connection for a wafer probe. Dimensions are given below. Model 4145A SECTION I Table 1-3. Accessories Supplied (Sheet 4 of 5) Configuration Description Three-meter triaxial (m) Cable (04145-61622): Triaxial (m) cable for connection between the 4145A’s SMU terminals and the Connector Plate. Cable length is 3m. Four cables are furnished. Refer to Figure 3-35 for the usage. jT’y Three-meter BNC (m) Cable (04145-61630): ST BNC (m) cable for connection between the 4145A’s Vs or Vm terminals and the Connector Plate. Cable length is 3m. Four cables are furnished. Refer to Figure 3-35 for the usage. Shorting Connector (04145-61623): Allows SMU output voltage to exceed ±42V when the 16058A Test Fixture is not used. With the Shorting Connector connected to the System Cable connector on the rear panel, the instrument’s fixture-lid-open detector is disabled, and the instrument assumes a fixture- lid-closed condition. WARNING A POTENTIAL SHOCK HAZARD EXISTS WHEN THE SHORTING CONNECTOR IS CONNECTED TO THE 4145A. DO NOT TOUCH THE OUTPUT TERMINAL OR INNER CONDUCTOR OF SMU DURING MEASUREMENT. 1-19 SECTION I Model 4145A Table 1-3. Accessories Supplied (Sheet 5 of 5) Configuration Description Software Discs (04145-61100): Disc set includes 5 Software Discs, Cleaning Disc (P/N: 9164-0168), labels, and write-protect tabs. If extra discs are required, order the 16261A. Software Disc Set. It contains 5 software Discs. Note Software discs cannot be purchased individually. 1-20 Model 4145A SECTION II SECTION II 8M§?ALlATI©ftS 2-1. INTRODUCTION 2-2. This section provides installation instruc¬ tions for the Model 4145A Semiconductor Parameter Analyzer. This section also includes information on initial inspection and damage claims, preparation for using the 4145A, and packaging, storage, and shipment. 2-3. INITIAL INSPECTION 2-4. The 4145A Semiconductor Parameter Analyzer, as shipped from the factory, meets all the specifications listed in Table 1-1. Upon receipt, inspect the shipping container for damage. If the shipping container or cushioning material is damaged, it should be kept until the contents of the shipment have been checked for completeness and the instrument has been checked mechanically and electrically. The contents of the shipment should be as shown in Figure 1-1. The procedures for checking the general electrical operation are given in Section III (Paragraph 3-10 SELF TEST) and the procedures for checking the 4145A Semicon¬ ductor Parameter Analyzer against its specifications are given in Section IV. First, do the self test. If the 4145A is electrically questionable, then do the Performance Tests to determine whether the 4145A has failed or not. If the contents are incomplete, if there is mechanical damage or defects (scratches, dents, broken switches, etc.), or if the performance does not meet the self test or performance tests, notify the nearest Hewlett-Packard office (see list at back of this manual). The HP office will arrange for repair or replacement without waiting for claim settlement. 2-5. PREPARATION FOR USE 2-6. POWER REQUIREMENTS 2-7. The 4145A requires a power source of 100, 120, 220 Volts ac +10%, or 240 Volts ac +5%-10%, 48 to 66Hz single phase; power consumption is 270VA maximum. WARNING IF THE INSTRUMENT IS TO BE ENERGIZED VIA AN EXTERNAL AUTOTRANSFORMER UNIT FOR VOLTAGE REDUCTION, BE SURE THAT THE COMMON TERMINAL IS CONNECTED TO THE NEUTRAL POLE OF THE POWER SUPPLY. 2-8. Line Voltage and Fuse Selection CAUTION BEFORE TURNING THE 4145A LINE SWITCH TO ON, VERIFY THAT THE INSTRUMENT IS SET TO THE VOLTAGE OF THE POWER TO BE SUPPLIED. 2-9. Figure 2-1 provides instructions for line voltage and fuse selection. The line voltage selection switch and the proper fuse are factory installed for 100 or 120 volts ac operation. CAUTION USE PROPER FUSE FOR LINE VOLTAGE SELECTED. CAUTION MAKE SURE THAT ONLY FUSES FOR THE REQUIRED RATED CURRENT AND OF THE SPECIFIED TYPE ARE USED FOR RE¬ PLACEMENT. THE USE OF MENDED FUSES AND THE SHORT-CIRCUITING OF FUSE- HOLDERS MUST BE AVOIDED. 2-10. LINE FREQUENCY FILTER 2-11. To reject the effects of line-frequency noise, set the FILTER switch on the rear panel to the frequency of the ac power source. 2-1 SECTION II Model 4145A 2-12. POWER CABLE 2-13. To protect operating personnel, the National Electrical Manufacturer’s Association (NEMA) recommends that the instrument panel and cabinet be grounded. The Model 4145A is equipped with a three-conductor power cable which, when plugged into an appropriate receptacle, grounds the instrument. The offset pin on the power cable is the ground wire. 2-14. To preserve the protection feature when operating the instrument from a two contact outlet, use a three prong to two prong adapter (HP Part No. 1251 -€048) and connect the green pigtail on the adapter to power line ground. CAUTION THE MAINS PLUG MUST ONLY BE INSERTED IN A SOCKET OUTLET PROVIDED WITH A PROTECTIVE EARTH CONTACT. THE PRO¬ TECTIVE ACTION MUST NOT BE NEGATED BY THE USE OF AN EXTENSION CORD (POWER CABLE) WITHOUT PROTECTIVE CONDUC¬ TOR (GROUNDING). 2-15. Figure 2-2 shows the available power cords, which may be used in various countries including the standard power cord furnished with the instrument. HP Part number, applicable standards for power plug, power cord color, electrical characteristics and countries using each power cord are listed in the figure. If assistance is needed for selecting the correct power cable, contact the nearest Hewlett- Packard office. 2-16. OPERATING ENVIRONMENT 2-17. Temperature. The instrument may be operated in temperatures from +10°C to +40°C. 2-18. Humidity. The instrument may be operated in environments with relative humidities to 70% at 40 °C. However, the instrument. should be protected from temperature extremes which cause condensation within the instrument. 2-19. INSTALLATION INSTRUCTIONS 2-20. The HP Model 4145A can be operated on the bench or in a rack mount. The 4145A is ready for bench operation as shipped from the factory. For bench operation a two-leg instrument stand is used. For use, the instrument stands are designed to be pulled towards the front of instrument. 2-21. Installation of Options 907, 908 and 909. 2-22. The 4145A can be installed in a rack and be operated as a component of a measurement system. Rack mounting information for the 4145A is presented in Figure 2-3. 100V OPERATION 120V OPERATION Fuse : 2.5A 250V % (HP P/N: 2110-0015) 220V OPERATION 240 V OPERATION Fuse: 1 . 25 A 250V % (HP P/N: 2110-0305) 2-2 Figure 2-1. Voltage and Fuse Selection. Model 4145A SECTION II OPTION 900 United Kingdom OPTION 901 Australia/New Zealand Plug: BS 1363A, 250V Cable: HP 8120-1703 Plug : NZSS 198/AS C112, 250V Cable: HP 8120-0696 OPTION 902 European Continent OPTION 903 U.S./Canada Plug: CEE-VII, 250V Cable: HP 8120-1692 OPTION 904 U.S./Canada Plug: NEMA 6-15P, 250V, 6A Cable: HP 8120-0698 Plug: NEMA 5-15P, 125V, 15A Cable: HP 8120-1521 OPTION 905** Plug: CEE 22-VI, 250V Cable: HP 8120-1860 Any country Figure 2-2. Power Cables Supplied. 2-3 SECTION II Model 4145A 2-23. STORAGE AND SHIPMENT 2-24. ENVIRONMENT 2-25. The instrument may be stored or shipped in environments within the following limits: Storage: Temperature .-22 ° C to +55 ° C (+4 °C to +50 ° C with discs) Humidity.8% to 80% (RH) Shipment : Temperature . -40 0 C to +62 0 C (-40 °C to +50 °C with discs) Humidity . 8% to 80% (RH) The instrument should be protected from temperature extremes which cause condensation inside the instrument. 2-26. PACKAGING 2-2Y. Original _ Packaging . Containers and materials identical to those used in factory packaging are available from Hewlett-Packard. If the instrument is being returned to Hewlett-Packard for servicing, attach a tag indicating the type of service required, return address, model number, and full serial number. Also mark the container FRAGILE to assure careful handling. In any correspondence, refer to the instrument by model number and full serial number. 2-28. Other Packaging . The following general instructions should be used for re-packing with commercially available materials: a. Wrap instrument in heavy paper or plastic. If shipping to Hewlett-Packard office or service center, attach tag indicating type of service required, return address, model number, and full serial number. d. Seal shipping container securely. e. Mark shipping container FRAGILE to ensure careful handling. f. In any correspondence, refer to instrument by model number and full serial number. b. Use strong shipping container. A double-wall carton made of 350 pound test material is adequate. e. Use enough shock absorbing material (3 to 4 inch layer) around all sides of instrument to provide firm cushion and prevent movement inside container. Protect control panel with cardboard. 2-4 Model 4145A SECTION II Option Kit Part Number Parts Included Part Number Q’ty Remarks 907 Handle Kit Front Handle © 5060-9901 2 5061-0091 Trim Strip © 5020-8898 2 X8-32 x 3/8 Screw 2510-0195 6 9.525mm 908 Rack Flange Kit Rack Mount Flange © 5020-8864 2 5061-0079 X8-32 x 3/8 Screw 2510-0193 6 9.525mm 909 Rack Flange & Front handle © 5060-9901 2 Handle Kit Rack Mount Flange © 5020-8876 2 5061-0085 X8-32 x 3/8 Screw 2510-0194 6 15.875mm 1. Remove adhesive-backed trim strips © from side at right and left front of instrument. 2. HANDLE INSTALLATION : Attach front handle © to sides at right and left front of instrument with screws provided and attach trim ©to handle. 3. RACK MOUNTING : Attach rack mount flange © to sides at right and left front of instrument with screws provided. 4. HANDLE AND RACK MOUNTING : Attach front handle © and rack mount flange © together to sides at right and left front of instrument with screws provided. 5. When rack mounting (3 and 4 above), remove all four feet (lift bar at inner side of foot, and slide foot toward the bar). Figure 2-3. Rack Mount Kit. 2-5 Model 4145 A SECTION III iiCTIOM 918 OPERATION 3-1. INTRODUCTION 3-2. This section provides all the information necessary to operate the Model 4145A Semiconductor Parameter Analyzer. Included are descriptions of the front and rear panels, graphics display, lamps, and connectors; discussions on operating procedures and measuring techniques for typical applications; and instructions on the instruments self-test function and HP-IB capabilities. A breakdown of the contents of this section is given in Figure 3-1. Warnings and cautions are given throughout; they must be observed to insure operator safety and continued instrument serviceability. WARNING BEFORE THE INSTRUMENT IS TURNED ON, ALL PROTECTIVE EARTH TERMINALS, EXTENSION CORDS, AUTO-TRANSFORMERS AND DEVICES CONNECTED TO THE INSTRUMENT MUST BE CONNECTED TO A PROTECTIVE EARTH- GROUNDED SOCKET. ANY INTER¬ RUPTION OF THE PROTECTIVE EARTH GROUNDING WILL CAUSE A POTENTIAL SHOCK HAZARD THAT COULD RESULT IN SERIOUS PERSONAL INJURY. ONLY FUSES OF THE REQUIRED RATED CURRENT AND OF THE SPECIFIED TYPE SHOULD BE USED. DO NOT USE REPAIRED FUSES OR SHORTED FUSEHOLDERS. TO DO SO CAN CAUSE A SHOCK OR FIRE HAZARD. CAUTION BEFORE THE INSTRUMENT IS TURNED ON, IT MUST BE SET TO THE VOLTAGE OF THE POWER SOURCE (MAINS), OR DAMAGE TO THE INSTRUMENT MAY RESULT. Figure 3-1. Contents of Section III. 3-1 SECTION III Model 4145A 3-3. PANEL FEATURES 3-4. The front and rear panels of the 4145A are briefly described in Figures 3-2 and 3-3, respectively. Detailed information is given starting in paragraph 3-5. (!) LINE ON/OFF: Applies ac line power to the instrument when set to the ON (m) position. Removes ac line power when set to the OFF (JB_) position. SELF TEST is performed each time the instrument is turned on. After SELF TEST is performed, the start-up MENU is displayed. j© CRT DISPLAY: Displays all measurement setups, measure¬ ment results, softkey labels, special user functions, operator messages, error codes and messages, and warnings. All displays can be dumped directly onto an HP-IB plotter, without a controller, by pressing the PLOT key (?) . If an HP-IB controller, fluent in HP-GL (Hewlett-Packard Graphics Language), is connected, the CRT can be used as an independent graphics display. Refer to paragraph 3-103 and 3-107 for details. Figure 3-2. Front Panel 3-2 (3) SOFTKEYS: These eight keys are used for measurement setup, parameter selection, and function selection. The function of each softkey is defined by the operating system software and changes depending on the page displayed. Softkeys labels are displayed on the CRT (2) in the form of a “softkey prompt” (SKP). Each time the SKP changes, the functions of the corresponding softkey changes. Pressing the EXTN (extended) displays additional softkey functions. A description for each softkey function is provided in the description of the page on which it appears. (4) PAGE CONTROL Keys : These three keys control paging on the CRT © . Refer to paragraph 3-40 for a description of the PAGE concept. MENU: When pressed, returns the display to the start-up menu. Can be used anytime except during measure¬ ment or auto-calibration or other functioning. Features (Sheet 1 of 6). Model 4145A SECTION III NEXT: Advances the display to the next page. Each time this key is pressed, the instrument checks the presently displayed page for any illegal settings, and if it detects any errors, it displays the corresponding error message and does not advance to the next page, or automatically changes the settings. PREV : Returns the display to the previous page. Each time this key is pressed, the instrument checks the presently displayed page for any illegal settings. (5) MEASUREMENT Keys: These keys start and stop the measurement. After all measurement conditions have been set and the GRAPHICS PLOT page, LIST DISPLAY page, MATRIX DISPLAY page, or SCHMOO PLOT page is displayed, measurement is started by pressing SINGLE, REPEAT, or APPEND. Measurement can be stopped by pressing STOP. Measurement is a sequential operation consisting of voltage or current sweep, measurement, and storage of the measurement result. SINGLE: When this key is pressed, results of the previous measurement are erased from memory, the new measurement is made, and the results are stored in memory. REPEAT: When this key is pressed, measurement is repeatedly made until STOP is pressed. Results of the previous measurement are updated during each new mea¬ surement. APPEND : Functions similarly to the SINGLE key except that results of the previous measurement are not erased from memory of the CRT. Results of a measurement made using this key are stored in the remaining unused portion of memory and are displayed over (overlay plot) the previous plot. Measurement can be made using this key until “Buffer full” is displayed. STOP: Immediately stops the measure¬ ments. (6) AUTO SEQ Key : These keys start and stop the ASP (Auto Sequence Program) listed on the SETUP AUTO SEQUENCE page. Refer to paragraph 3-61 for details on Auto Sequence Programs. START/STOP : Starts the ASP from line 1. If pressed during the ASP, the ASP stops immediately. Once stopped, the ASP cannot be continued from the stop point. CONT: If the ASP contains a PAUSE statement, this key continues the program from the line immediately follow¬ ing the PAUSE statement. © IN TEG TIME Keys : These keys are used to select the digital integration time. When MED or LONG integration is selected, the integration time is an integral number of the line frequency period, eliminating line frequency noise. SHORT is the initial control setting. The integration time can be changed at any time, even during measurement. SHORT: Measurement data is stored directly into memory without integration. MED : Integration time is set to one line frequency period. Sixteen samples are taken at each measurement point. LONG: Integration time is set to sixteen line frequency periods. A total of 256 samples are taken at each measurement point. Figure 3-2. Front Panel Features (Sheet 2 of 6). 3-3 SECTION III ‘ Model 4145A © ® (8) HP-IB Status Indicators and LOCAL Key : These four LED lamps—SRQ, LISTEN, TALK, and REMOTE—indicate the status of the 4145A when interfaced with a controller via the HP-IB, or connected directly to a printer/plotter. The LOCAL key, when pressed, releases the 4145A from remote (HP-IB) control and enables control from the front panel. The LOCAL key does not function when the instrument is set to local lockout by the controller or in the GL mode. (9) PLOT and PRINT Keys The PLOT key is used to dump whatever is displayed on the CRT directly onto an HP-IB plotter (e.g., HP9872C), without a controller. Plot area can be set from the 4145A’s front panel. Plotting starts when EXECUTE is pressed. Pressing PLOT a second time stops the plot immediately. Refer to paragraph 3-117 for more information on the PLOT function. The PRINT key functions similarly to the PLOT key except that a printer is used instead of a plotter and only alphanumeric data is output. If the PRINT key is used to output the results of a graphic plot, for example, only the numeric value of each measurement point is printed. Refer to paragraph 3-119 for more information on the PRINT function. (0) BLUE Key and GREEN Key : These keys are used to access additional key functions. Additional key functions are labeled in blue and green. BLUE Key: This key is used when entering comments, varia¬ bles, and program names. Once this key is pressed (key indicator lamp on), it remains on until pressed again. When the CHANNEL DEFINITION page is dis¬ played or when a SAVE/GET operation, COMMENT ope¬ ration or PURGE operation is being performed, the BLUE key is automatically set to ON (key indicator lamp on). GREEN Key : This key is used when entering physical constants and certain special sym¬ bols. It is valid for one key-in operation only; that is, it must be pressed each time a green-labeled key function is desired. 3-4 Figure 3-2. Front Panel Features (Sheet 3 of 6). Model 4145A SECTION III (Q) ENTER Key: This key is used to enter parameter values, alphanumeric characters, special charac¬ ters, and unit indicators displayed on the Keyboard Input Line (see Figure 3-5) into the internal display buffer. When this key is pressed, data displayed on the Keyboard Input Line is moved to the display field indicated by the field pointer ( ►) and stored in the display buffer. Data stored in the display buffer by the ENTER key can be recalled (re-displayed on the Keyboard Input Line) by pressing the RECALL Key Q9). Up to 60 characters can be entered info the buffer, but only 27 characters can be displayed at one time. To display the rest of the buffer contents, use the BACK key or FORWARD key. © EXECUTE Key: This key executes GET, SAVE, PRINT, PLOT, PURGE, and REPACK commands, and arithmetic expressions displayed on the Keyboard Input Line. Note: The PURGE and REPACK com¬ mands are available only when the USER FILE CATALOG is displayed. (jj) CURSOR Control Keys : These keys control the positioning of the field pointer (£>) and the long and short cursors. (They do not control the cursor on the Keyboard Input Line.) Field Pointer Control: Pressing the ^ , ‘O’ > C 3 > °r O key moves the field pointer (&>) in the indicated direction. The FAST key cannot be used for field pointer control. Long/Short Cursor Control: Pressing the ^ , O , or O key moves the cursor in the indicated direction. Movement continues until the key is released. Two direction-keys can be pressed simultaneously to move the cursor diagonally. Pressing the FAST key in conjunction with one or two of the direction keys, causes the cursor to move more rapidly. @ MARKER Control Dial: This dial controls the marker ( © or *) on the GRAPHICS PLOT page. Rotating the dial clockwise moves the marker from the sweep start point to the sweep stop point. (£§) AUTO CAL KEY: This key enables continuous auto-calibration of the 4145A. The AUTO CAL function is set to ON (key indicator lamp on) when the instrument is turned on. Refer to paragraph 3-37 for details. ©, @, @ DATA ENTRY Keys: These keys are used to enter numeric values, arithmetic operators, and engineering units. Data entered with these keys is displayed on the CRT’s Keyboard Input Line and entered into the display buffer by pressing the ENTER key (H) . An arithmetic expression entered with these keys is executed by pressing the EXECUTE key. (f§) Engineering Unit Keys : Four engineering units are available—m (milli, 10″ 3 ), u (micro, 10~ 6 ), n (nano, 10“ 9 ), and p (pico, 10 -12 )—for use with the numeric keys (18). (1J) Arithmetic Operator and Function Keys : Nine arithmetic operators and functions are available—+, *, /, f~ , A, (, ), EEX (scientific notation)—for use in arithmetic calculations. Five additional operator and functions are available with the alphabetic (blue) keys : ** (exponentiation), LOG, LN (natural log), EXP (natural base), and ABS (absolute). The SPACE key is also included in this key group. @ Numeric Keys : These keys—0 through 9 and decimal point—are used for entering measurement parameter values and for making quick arithmetic calculations. i Figure 3-2. Front Panel Features (Sheet 4 of 6). 3-5 SECTION III Model 4145A EDIT Keys : These keys are used to edit data displayed on the Keyboard Input Line. BACK : Moves the Keyboard Input Line cursor (—) left one position. If this key is pressed while the cursor is at the left-most position, the displayed text will move to the right. FORWARD: Moves the Keyboard Input Line cursor (_) right one position. If this key is pressed while the cursor is at the right-most position, the displayed text will move to the left. DELETE: Causes the character at the position of the cursor to be deleted. The cursor remains at the same position and all text to the right of the deleted character moves one position to the left as each character is deleted. INSERT: Causes the character at the position of the cursor and all text to the right of the cursor to move right one position, leaving a space at the position of the cursor and allowing insertion of additional characters. To exit from this mode, press INSERT a second time. RECALL: Causes previous entries or executions to be re-displayed on the Keyboard Input Line. CLEAR: Clears all text from the Keyboard Input Line and returns the cursor to the home (left-most) position. 3-6 Figure 3-2. Front Panel Features (Sheet 5 of 6). Model 4145A SECTION III @ USER FILE Keys: These keys are used to store program or data files onto the disc or to recall them. SAVE: Used to store the existing measurement setup, mea¬ surement result, or auto-sequence program onto the flexible disc. Press SAVE, enter the file type (P for a measurement setup, D for a measurement result, S for an auto-sequence program), file name, and comment (if necessary), and then press EXECUTE ricated test fixture is used. These connectors cannot be connected to the 16058A Test Fixture. Maximum allowable input voltage is +20V dc. © Voltage Source (Vs) Output Connectors : Two female BNC connectors for Vsl and Vs2. Used in applications in which a user-fabricated test fixture is used. These connectors cannot be connected to the 16058 A Test Fixture. Maximum output voltage is +20V dc. © SMU Output Connectors : Four triaxial connectors for SMU1 through 4. Can be connected to the 16058A Test Fixture or to a user-fabricated test fixture. Each connector outputs or measures up to + 100V or ±100mA. © COM (COMMON)-GROUND Terminals: Common (© and Ground (.L) for floating and grounded measurements. The common terminal is tied directly to the outer-conductor of the Vm © , Vs © , and SMU © connectors; the ground terminal is tied directly to the instrument chassis. For grounded measurements, these terminals must be interconnected using the shorting- bar. For floating measurements, disconnect the shorting-bar. WARNING A POTENTIAL SHOCK HAZARD MAY EXIST WHEN COMMON IS NOT CONNECTED TO GROUND (SHORTING-BAR DISCON¬ NECTED). DO NOT, REGARDLESS OF THE OUTPUT VOLTAGE, TOUCH THE COMMON TERMINAL OR OUTER CONDUCTOR OF THE SMU, Vs, OR Vm CONNECTORS DURING A FLOATING MEA¬ SUREMENT (SHORTING-BAR DISCONNECTED). 3-8 Figure 3-3, Rear Panel Features (Sheet 1 of 2). Model 4145A SECTION III (5) FILTER Switch : This switch determines the measurement integration time, to reduce the effects of line-frequency noise. Set this switch to the frequency of the ac power source. (6) System Cable Connector : Twenty-four pin connector for inter¬ connection between the 16058A Test Fixture and the 4145A. Vsl, Vs2, Vml, Vm2, and the fixture-lid-open detector are connected to this connector. When the 16058A is not used, this connector should be terminated with the furnished shorting-termination if voltages exceeding + 42V are to be output. WARNING WHEN THE SHORTING- TERMINATION IS CONNECTED TO THE SYSTEM CABLE CONNECTOR, THE 4145A’S PROTECTIVE CIRCUIT IS DISABLED. VOLTAGES AT THE SMU AND Vs OUTPUTS CAN REACH +100V AND ±20V, RESPECTIVELY. DO NOT TOUCH THE POINT OR POINTS AT WHICH THE SMU’S OR VOLTAGE SOURCES ARE CONNECTED. (8) LINE VOLTAGE SELECTOR Switches These switches select the appropriate ac operating voltage. Selectable voltages are 100V/120V+10% and 220V±10% / 240V+5% -10% (48 – 66Hz). Refer to paragraph 2-5. (9) LINE Input Receptacle : AC power cable is connected to this receptacle. Refer to paragraph 2-5. @ HP-IB Control Switch : This switch sets the 4145A’s HP-IB address (0 – 30), data output format (COMMA or CR/LF), and interface capability (EOI ON or OFF). Specific information on this switch is given in paragraph 3-97. (jl) HP-IB Connector : Twenty-four pin connector; connects the 4145A to the HP-IB for remote operations. Also used to connect a printer/plotter. (12) External CRT Output Connectors : Three BNC (f) connectors for connection to an external X-Y-Z display. Refer to paragraph 3-121. © LINE FUSE Holder : The 4145A’s power-line fuse is installed in this holder. 100V/120V operation : 2.5AT, 250V (HP P/N : 2110-0015) 200V/240V operation : 1.25AT, 250V (HP P/N : 2110-0305) Figure 3-3. Rear Panel Features (Sheet 2 of 2). 3-9 SECTION III Model 4145A 3-5. FLEXIBLE DISC HANDLING 3-6. Five work-discs and one head-cleaning disc are furnished with the 4145A. Each work-disc contains the required operating system software, four general purpose measurement setups, and 33.5K bytes of user area. Installation and removal procedures for the disc are shown in Figure 3-4. Precautions on handling and storing the flexible discs are given below. 1. When not in use, each disc should be placed in its own outer jacket. Exposed areas of the disc should be completely covered by the jacket. 2. Store discs in an upright position. Do not stack or pile discs. 3. Store discs in a clean, dry, fireproof cabinet. Do not expose to direct sunlight, extremes of temperature or humidity, or magnetic fields. 4. Do not touch the exposed surface of the disc. 5. Do not apply strong pressure to the protective jacket. When labelling a disc, use a felt-tip pen. Do not use a pencil or ball-point pen. 6. Do not bend the discs. CAUTION DO NOT INSERT ANYTHING OTHER THAN FLEXIBLE DISCS INTO THE DISC DRIVE. Note Use only the discs furnished with the 4145A. 3-7. CRT DISPLAY 3-8. The 4145A is equipped with the HP Model 1345A Digital Display. For complete infor¬ mation on the 1345A, refer to the 1345 A Operation and Service Manual, included in this binder. 3-9. Useable display area on the CRT is shown in Figure 3-5. Operator adjustments are given in Figure 3-6. (a) Push firmly and release. (d) Push the door until clicks. (b) Door opens. (c) Carefully insert or remove the disc. Note : Fully insert the disc into the disc drive before closing the disc drive door. 3-10 Figure 3-4. Disc Installation and Removal. Model 4145A SECTION III The CRT is sectioned into five areas, as shown in the figure. Description for each area is as follows : (T) Page Display Area : The instrument’s various pages are displayed in this area. When the PLOT key is pressed, only this area is output to the plotter. (2) Command Display Area : The SAVE, GET, PLOT, PRINT, PURGE and REPACK commands are displayed in this area. ( 3 ) Keyboard Input Line : All keyboard (front panel) entries are displayed in this area. Up to 60 characters can be entered but only 27 can be displayed. To edit the displayed characters, use the BACK, FORWARD, DELETE and INSERT keys. When the RECALL key is pressed, the previous entry is re-displayed. ( 4 ) System Message Line : Displays instructions, error messages, and error codes. When the instrument is turned on, instrument status is displayed. ( 5 ) Softkey Prompt Display Area : Displays Softkey Prompts (SKP). Note (2) , (D , and @ are erased by pressing the CLEAR key. Figure 3-5. Useable Display Area. 0 © © © © CRT intensity and focus adjustment. (Requires a small flat-tip screwdriver.) (1) Turn on the 4145A. The MENU page will be displayed on the CRT. (2) Press the EXTN softkey and the DIAG softkey. (3) Press the GDU TEST softkey. Display will be as shown in the figure. (4) Adjust INTENSITY © until all three lines (each line has a different intensity) are visible. ((D) (5) Adjust FOCUS @ until the corners of the displayed trace are sharp. (6) Press the MENU key. Figure 3-6. Operator Adjustment. 3-11 SECTION III Model 4145A 3-10. SELF TEST 3-11. The 4145A is equipped with an automatic self-diagnostic function that is initiated each time the instrument is turned on to confirm normal operation of the instrument’s basic functions. The SELF TEST can also be initiated from the DIAGNOSTICS page or via the HP-IB. When SELF TEST is performed at instrument turn-on, the five tests listed in Table 3-1 are automatically performed. If the instrument is operating normally, the MENU page will be displayed when the SELF TEST is completed. If an error is detected, an error code will be displayed on the CRT. When SELF TEST is initiated from the DIAGNOSTICS page or via the HP-IB, only two tests are performed (MPU test and SMU test). If the instrument fails the SELF TEST, contact the nearest Hewlett-Packard Service Office (see list at back of this manual). 3-12. ERROR MESSAGES/ERROR CODES 3-13. Error messages and error codes are displayed on the System Message Line of the CRT whenever an illegal operation or out-of-range measurement is made, or whenever an internal circuit fails. Error messages and error codes related to operator errors (not instrument failure) are listed in Table 3-2 and 3-3, respectively. Error codes related to instrument failure are listed in Table 3-4. If the instrument displays one of the error codes listed in Table 3-4, contact the nearest Hewlett- Packard Sales/Service Office. Note One of the error codes listed in Table 3-4 may be displayed if the instrument is turned on after experiencing an extreme change of ambient temperature. In this case, allow the instrument to fully warm up (ignore the displayed error code), and then turn it off and on one time. Table 3-1. 4145A SELF TEST Test Name Description MPU test Checks the basic functions of the MPU (Microprocessor Unit) by checking four ROMs (Read-Only Memory) and sixteen RAMs (Randam-Access Memory). GDU test Checks the functions of the GDU (Graphics Display Unit). MSU test Checks the MSU (Mass Storage Unit : Flexible Disc Drive and Disc). HP-IB test Checks all HP-IB interface capabilities. SMU test Checks the basic functions of the four SMUs. 3-12 Model 4145A SECTION III Table 3-2. Error Messages (Sheet 1 of 2) Error Message Meaning Corrective Action No source name An SMU that has been assigned a source mode (COM, V, or I) has not been assigned a corresponding V or I source name. If the source mode is COM or V, enter a source name in the V column; if the source mode is I, enter a source name in the I column. Duplicate name Two or more channels have the same name. Re-assign the channel names. Illegal function VAR1, VARl’, or VAR2 is speci¬ fied more than once. Specify VAR1, VARP, and VAR2 only once. VAR1 and VAR1′ are not in the same source mode. Set VAR1 and VAR1′ to the same source mode. Overflow Number of steps for VAR1 exceeds 512. Change the value of START/STOP or STEP. An attempt was made to input a value that is outside specified limits. Enter a value that is within specified limits. No name No name is entered in the NAME field on the MEAS/DISP MODE SETUP page. Select a name from those displayed in the softkey prompt area. No monitor channel No monitor channel name is entered in the NAME field on the MEAS/DISP MODE SETUP page, or the name entered in the NAME field cannot be used as a monitor channel name. Select a monitor channel name from those displayed in the softkey prompt area. Illegal setup LOG Sweep: START and STOP (Display) (MIN and MAX) values have different signs. Change one of the signs. Current value is too high because source mode has been changed from V to I. Change the current (I) value setting. INTERVAL or NO. OF RDNGS for a time domain measurement is set to 0. Enter correct value : Up to 10s for INTERVAL and from 1 to 512 for NO. OF RDNGS. Duplications on the OUTPUT SEQUENCE SETUP page. Rearrange the output sequence. Buffer full Measurement data exceeds the capacity of the data buffer. Data buffer capacity is 512 measurement points for a single sweep, or up to 575 (depends on the number of monitor channels used, VAR2 steps and the number of times APPEND is used) in other cases. 3-13 SECTION III Model 4145A Table 3-2. Error Messages (Sheet 2 of 2) Error Message Meaning Corrective Action Syntax error An illegal name was entered in a GET or SAVE command. The first character of a file name must be alphabetic, and all succeeding characters must be alphanumeric. PLOT area is not specified, contains one or more alpha¬ betic characters, or is miss¬ ing coordinate delimiters (comma or space). Re-enter the PLOT area correctly. Illegal file type. Use P, D, or S for the file type. Busy Auto calibration is being per¬ formed. Auto calibration is performed every 5 minutes. No data PRINT Key was pressed with no measurement data in the data buffer. Perform a measurement. Printer/ Plotter is not connected No printer or plotter is con¬ nected to the instrument, or the printer or plotter is not set to LISTEN. Connect the printer or plotter. Not compatible The discs used in the copy operation have different sys¬ tem labels, or one of the discs is not a 4145A useable disc. Copy cannot be performed. Close the fixture lid The fixture lid is open at the start of a measurement in which the output voltage may exceed ±42V or lid is open during the User Mode (See Fig. 39). Close the lid or change the setup. Make sure the system cable is properly con¬ nected. Output disabled, close the fixture lid The fixture lid was opened during a measurement in which the output voltage may exceed ±42V. Close the fixture lid and make the measure¬ ment again. Do not open the fixture lid during measurement. Make sure the system cable is properly connected. Emergency Output was shut down to pre¬ vent SMU damage. Make sure the setup and all connections are correct. Recovered from power down Indicates that there was a mo¬ mentary power loss. When a power loss occurs during measure¬ ment, output is shut down. Press MEA¬ SUREMENT key to continue the mea¬ surement. Step overflow NO OF STEPS for VAR1 exceeds 512. Change START value, STOP value, or STEP value. Disabled function A disabled softkey was pressed. The softkey cannot be used in the existing measurement setup. 3-14 Model 4145A SECTION III Table 3-3. Operational Error-Codes (Sheet 1 of 2) Display Meaning Error E01 Arithmetic operator (-, +, /, *) or parenthesis is required. Error E02 EXECUTE was pressed with no executable text on the Keyboard Input Line. Error E03 Object buffer overflow. Error E04 Improper A (delta) operation. Error E05 User function is used in the expression. (User function cannot be used in an arithmetic expression.) Error E06 No variable or constant following an arithmetic operator. Error E07 Arithmetic expression contains an undefined variable. Error E08 Too many signs or parentheses. Error E09 Constant value is too large. Error 101 Stack Register overflow. Error 102 Improper calculation was attempted. For example, the divisor is zero. Error 103 Insufficient A data. Error M02 Disc is not inserted or is not correctly inserted. Error M03 The disc is write protected. Error M04 Illegal file name or file type. Error M05 The file name specified in the SAVE command has already been reserved for the specified file type. Error M06 Number of total files exceeds 96. Error M07 Number of total records exceeds 131. Error M08 User area may be lost. Copy immediately onto another disc. Error Ml9 The disc was not initialized for the 4145A. Error Z01 The program specified by the GET command in the auto-sequence program contains an error. Press CONT to perform the next step of the auto-sequence program. Error Z02 The SINGLE command can be executed from the GRAPHICS, MATRIX, LIST, or SCHMOO page only. Press CONT to perform the next step of the auto-sequence program. Error Z03 PLOT or PRINT was performed by the auto-sequence program but no printer/plotter is connected to the 4145A or the printer/plotter is not set to LISTEN. Press CONT to perform the next step of the auto- sequence program. 3-15 SECTION III Model 4145A Table 3-3. Operational Error-Codes (Sheet 2 of 2) Display Meaning Error Z04 The test fixture lid is open during an auto-sequence program in which the output voltage may exceed +42V. Press CO NT to perform the next step of the auto- sequence program. Data Errors Depending on the number of channels used in the measurement, up to six 2-digit numbers are displayed, in the format shown below, whenever the measurement cannot be performed correctly. Error DXX XX XX XX XX XX Here, XX is a 2-digit number which represents channel status. The left-to-right order in which the 2-digit error codes appear corresponds to the order in which the channels are assigned on the MEAS/DISP MODE SETUP page. Also, the number of 2-digit error codes that appear is identical to the number of channels used in the measurement. The left digit of XX is hexadecimal and must be converted into a 4-digit binary number, as described below. The right digit is decimal and requires no conversion. Also, zero means no error. Stack register overflow Calculation error Insufficient data for A measurement Undefined user-function INTERVAL in a time domain measurement is too short. Complete measurement data cannot be stored before the next measurement begins. Convert hexadecimal number into binary. I— A/D converter saturated. -Oscillation -Other channel has reached compliance limit. -This channel has reached compliance limit. Channel correspondence is shown below : GRAPHICS PLOT DXX XX XX X axis Y1 axis Y2 axis LIST DISPLAY: Error DXX XX XX XX XX 1st 2nd 3rd 4th 5th MATRIX DISPLAY, SCHMOO PLOT: Error DXX Model 4145A SECTION III Table 3-4. Hardware-Related Error-Codes Display Meaning Error P01 – P04 One of the four ROMs (Read Only Memory) is not functioning properly. P05 – P20 One of the sixteen RAMs (Ramdom Access Memory) is not functioning properly. P21 MPU’s (Microprocessor Unit) peripheral circuit is not functioning properly. M08 – M18 MSU (Mass Storage Unit : Flexible Disc and drive) is not functioning properly. Try another disc. A01 SMU controller is not functioning properly. CHAN (! ! ! DOWN ! ! !) CHAN (XX,XX,XX,XX) SMU itself is not functioning properly. (XX indicates the SMU number and error code. Refer to Fig. 3-20.) Note If a momentary power loss occurs, the 4145A’s display may go blank. To recover, turn off the instrument, wait a few seconds, and then turn on the instrument. 3-17 SECTION III Model 4145A 3-14. INITIAL CONTROL SETTINGS 3-15. To facilitate operation, the instrument is automatically set to the following initial control settings each time it is turned on : Front Panel Controls : MEASUREMENT keys . OFF AUTO SEQ key. OFF INTEG TIME keys . SHORT PLOT/PRINT keys . OFF AUTO CAL key. ON BLUE key. OFF Internal Setup : CRT Display. MENU Page Measurement Program. GENL (see note) PLOT Area. Previously (for external plotter) specified values Note Each flexible disc contains four different application programs, of which GENL is one. Refer to paragraph 3-87 for details on the furnished applications programs. All data stored on the disc is retained; that is, the disc is not erased when the instrument is turned off. 3-16. USER-AREA FILING OPERATIONS 3-17. The 4145A uses a 5.25 inch, single-sided, single-density flexible disc as the storage medium for its MSU (mass storage unit). Each of the five work-discs furnished with the 4145A contains the necessary operating system software, four general purpose measurement programs, and enough user area for 131 records. Up to 96 files can be stored in the user-area. Note A record is the minimum unit for storage on the disc. A file consists of 1, 3, or 12 records, depending on the file type. Three types of files can be stored in the user-area : 1. Measurement program files—file type P : Specifying file type P in the SAVE command reserves 3 records on the disc and stores the existing measurement setup (channel assignments, parameter settings, graphic scaling, output sequence, etc.) at the reserved 3-record location. 2. Measurement data files—file type D : Specifying file type D in the SAVE command reserves 12 records on the disc and stores the measurement setup and measurement results (GRAPHICS, LIST, MATRIX, or SCHMOO) at the reserved 12-record location. 3. Auto-sequence program files—file type S : Specifying file type S in the SAVE command reserves 1 record on the disc and stores the existing auto-sequence program at the reserved 1-record location. For more information on file types, number of records used, etc., refer to Figure 3-30, 4145A FILE CATALOG Page. Four filing operations—SAVE, GET, PURGE, and REPACK—can be performed from the front panel. Each is described below : SAVE : Used to store the existing measurement setup (except INTEG TIME, AUTO CAL, and softkey functions), the existing auto-sequence program, output sequence setup, or the measurement results. SAVE cannot be used when the disc is write-protected. Before saving a measurement setup, a page check must be performed (refer to para. 3-44). To SAVE a file, press the SAVE key (SAVE will appear on the Keyboard Input Line of the CRT) and input the file type (P, D, or S) and file name. The file name can contain up to six characters, of which the first must be alphabetic and the last five must be alphanumeric. GET: Used to recall user-stored files from the disc. GET cannot be used to recall any of the furnished measurement programs. To GET a file from the user-area of the disc, press the GET key (GET will appear on the Keyboard Input Line of the CRT) and input the file type (P, D, or S) and file name. 3-18 Model 4145A SECTION III PURGE: Used to delete user-stored files from the disc. PURGE cannot be used with a write-protected disc, nor can it be used to delete any of the furnished measurement programs. It is available only when the 4145A FILE CATALOG page is displayed. To PURGE a file from the user-area of the disc, go to the MENU and select CAT softkey. When the 4145A FILE CATALOG page appears on the display, press the PURGE softkey (PURGE will appear on the Keyboard Input Line of the CRT) and input the file type (P, D, or S) and file name. DO NOT turn off the instrument during PURGE. REPACK: Used to repack all files stored in the user-area of the disc. REPACK cannot be used when the disc is write-protected, and is available only when the 4145A FILE CATALOG page is displayed. To REPACK the user-area, go to the MENU and select CAT softkey. When the 4145 A FILE CATALOG page appears on the display, press the REPACK softkey (REPACK will appear on the Keyboard Input Line of the CRT) and then press EXECUTE. SAVE, GET, PURGE, and REPACK cannot be input using the alphabetic keys and can be used for user-area filing operations only. No filing operations can be performed on the operating system software or the furnished applications programs. 3-18. ARITHMETIC CAPABILITIES 3-19. Arithmetic operations that can be performed on the 4145A are listed in Table 3-5. To perform an arithmetic operation, first key in the expression (it will appear on the display as you do so), then press EXECUTE. The result will be displayed on the Keyboard Input Line of the CRT in a floating decimal format (scientific notation). Example : J~ 2 + 1 Keystrokes: [73 |~2~| r+im I EXECUTE! Displayed Result : 2.4142E+00 Results of arithmetic operations are always displayed in scientific notation consisting of a 5-digit base and 2-digit exponent, regardless of the expression’s complexity. Thus, if 1+2 is executed, the result is displayed as 3.0000E+00. Also, the exponent is always a multiple of three, regardless of the exponent used in the original expression. For example, if 1E+07 is executed, the result is displayed as 10.000E+06. The decimal point is always positioned so that the exponent is a multiple of three. Results are always rounded before being displayed if they contain more than 5 digits. The first excess digit is checked, and if its value is 6 or greater, the digit to the left (the fifth digit) is incremented (rounded up) by one; if its value is 5 or less, the fifth digit is unchanged. For example, executing 1+1.00001 will result in 2.0000E+00, but executing 1+1.00006 will result in 2.0001E+00. Table 3-5. Arithmetic Operators Sign Name Example Equation Key Strokes 4 Addition 5+3 5 4- 3 EXECUTE – Subtraction 5-3 5 – 3 EXECUTE * Multiplication 5*3 (5×3) 5 * 3 EXECUTE / Division 5/3 (5+3) 5 / 3 EXECUTE r~ Square Root /T J~ 5 EXECUTE ** Exponentiation 5**3 (5 3 ) 5 * * 3 EXECUTE log Common Logarithm log 5 L 0 G ( 5 ) EXECUTE In Natural Logarithm ln5 L 0 G ( 5 ) EXECUTE EXP Base of Natural Log e 5 E X P ( s ) EXECUTE I 1 Absolute |-5| A B S ( 5 ) EXECUTE EEX Scientific Notation 5xl0 3 5 E E X 3 EXECUTE 3-19 SECTION III Model 4145A Arithmetic hierarchy is as follows : ** exponentiation *,/ multiplication and division +, – addition and subtraction Parentheses can be used to change this hierarchy; when used, they take highest priority. However, parentheses cannot be used for implied multiplication. The * operator must always be used to indicate multiplication. Thus, executing 2(3+5) will result in error E01. The correct format is 2*(3+5). A delta (zl) function is also provided, but it is not intended for general keyboard calculations. It is used in defining user functions (see paragraph 3-20) or in certain keyboard calculations on the GRAPHICS, MATRIX, LIST, or SCHMOO page. 3-20. Up to two user functions can be defined as arithmetic expressions in the USER FCTN field on the CHANNEL DEFINITION page. This allows automatic calculation of secondary parameters, such as hpg and gm, which are functions of applied and measured voltages and currents. For example, if the static collector characteristics of a bipolar transistor are to be measured and plotted, the transistor’s forward current transfer ratio, h FE , can be defined as HFE=IC/IB in the USER FUNCTION field on the CHANNEL DEFINITION page. HFE will appear as a softkey prompt on the MEAS&DISP MODE SETUP page and can be selected as the Y2 axis. When measurement is made on the GRAPHICS page, HFE will be plotted along with the primary characteristics—IC, IB, and VCE. Similarly, the transconductance, gm, of a field-effect tran¬ sistor can be defined as GM=ZlID/zJVG. There are limits to the size of arithmetic expressions that can be executed. Refer to Figure 3-7. -Work area (110 bytes) The maximum allowable length of an arithmetic expression is determined by the number of bytes it contains, not by the number of characters. If an expression contains more than 78 bytes, error E03 (object buffer overflow) will appear on the CRT (below the expression) when EXECUTE is pressed. The work area for user-function arithmetic expressions, however, is 124 bytes, of which 78 bytes (max.) are used for the object buffer. Arithmetic operators : +, -, *, /, ** 1 byte Variables and other operators 3 bytes Constants 5 bytes Figure 3-7. Byte Size of Arithmetic Expressions. The delta (zl) function can be used in user- function definitions or for keyboard calculations on the GRAPHICS, LIST, MATRIX, or SCHMOO page. In the latter case the value returned by executing zlA (where A is the name of one of the source or monitor channels) depends on the location of the marker (GRAPHICS page) or cursor (MATRIX, LIST, and SCHMOO pages). Here, zJA is calculated as half the difference between the values of A above and below the cursor (marker) location. In equation form where Ai is the value of A at the measurement step following the cursor (marker) position and A 2 is the value of A at the measurement step preceeding the cursor (marker) position. Note The result of the arithmetic function may include a rounding error. 3-20 Model 4145A SECTION III 3-21. SOURCE AND MEASUREMENT CHANNELS 3-22. The 4145A is equipped with eight channels for device stimulus and measurement. Channels 1 through 4 are stimulus/measurement units (SMUs), channels 5 and 6 are voltage sources (VS1 and VS2), and channels 7 and 8 are voltage monitors (Vml and Vm2). Refer to Figure 3-8. By correctly combining and setting up the source and measurement channels, a wide range of semiconductor devices can be measured. The SMUs are described in paragraph 3-23; the voltage sources and voltage monitors, in paragraph 3-25. 4 i 4 5 A Figure 3-8. Source and Measurement Channels of the 4145A. 3-23. Stimulus/Measurement Units (SMU) 3-24. A simplified circuit diagram of one of the four SMUs is illustrated in Figure 3-9. Each SMU can be set up to function as a voltage source/current monitor, current source/voltage monitor, or source common by specifying source mode V, I, or COM, respectively, in the SOURCE MODE field on the CHANNEL DEFINITION page (see Figure 3-21). Output voltage (SOURCE MODE V) and output current (SOURCE MODE I) can be hel

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