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Coater/Developer Mark Series – Tokyo Electron
… Mark was the first domestic model of coater/developer for TEL which was based … The CLEAN TRACK™ Mark 7/8’s was the innovative coater developer system …
Source: www.tel.com
Date Published: 3/22/2022
View: 6480
주제와 관련된 이미지 tel mark 8
주제와 관련된 더 많은 사진을 참조하십시오 RIte Track Refurbished TEL Mark 7/8 Coat Develop System. 댓글에서 더 많은 관련 이미지를 보거나 필요한 경우 더 많은 관련 기사를 볼 수 있습니다.
주제에 대한 기사 평가 tel mark 8
- Author: Rite Track Equipment Services
- Views: 조회수 3,198회
- Likes: 좋아요 12개
- Date Published: 2019. 3. 6.
- Video Url link: https://www.youtube.com/watch?v=dKe70V42GPE
Coater/Developer Mark Series
Best selling model with repeated innovative improvements following the posterity
The CLEAN TRACK™ Mark was the first domestic model of coater/developer for TEL which was based on the photoresist system developed and manufactured in US. The next developed CLEAN TRACK™ Mark-II was able to transit to larger wafer size to 6 inches with advanced controller. Through multiple efforts like introducing in-line models with exposure tools the system’s continuous improvement involved higher productivity. The CLEAN TRACK™ Mark-V realized various innovative technologies such as stacked clean oven module layout and high-speed wafer handling robotics, etc, so dramatically changed the concept of the conventional photoresist systems and set the worldwide standards for them.
TEL Mark 8
Missing parts:
FC-9821Ke Controller
Robotic arm assembly and board
ADH/Adhesion Unit
4x LHP units
2x Cool Plate units
WDS
4x RKC Controllers
a-1. Wafer Size: 200mm Dual Block System
b-1. Wafer Flow: Right to Left
CSB unit is in right side and interface station unit is in left side
c-1. Process Block: 2ea.
d-1. Block #1
aa. TEL Clean Track Mark 8 FC-9821Ke Controller: Missing
bb. Stage/Indexer: SMIF/Cassette Station
cc. CSA/Cassette Station Arm: 1ea.
e-1. Block #2
Normal Photo Resist Coat 2-1, 2-2 Units:
– 2ea. normal photo resist dispense nozzles per coat
– Total 2 normal photo resist dispense nozzles and 2 RRC resist pump per coat unit
– 1-side rinse nozzle (programmable side rinse EBR) for normal coat unit
– Dual back rinse nozzle
– Installed photo resist temperature control
– Installed motor flange temperature control
– Photo resist drain type: Direct gravity drain type
– Photo resist bottle quantity: 2 spaces
– Installed photo resist auto exchange
– Installed dummy dispense system
– Cup type: PP for upper cup and inner cup
– Auto damper: Cylinder only
f-1. Block #3
aa. Develop 3-1, 3-2 units:
– Single E2 nozzle for develop unit
– Dual top rinse nozzle for develop unit
– Installed back rinse nozzles for develop unit
– Installed develop temperature control
– Installed motor flange temperature control
– Drain type: Direct gravity drain type
– Installed auto damper
– Installed auto dummy dispense system
– Cup type: Stainless steel for upper cup and PP for inner cup
bb. PRA/Process Block Robotics Arm: 2ea/Missing assembly with board
cc. ADH/Adhesion Unit: 2ea/missing
dd. LHP/Low Temperature Oven Unit: 2ea/4ea missing
ee. COL/Cool Plate Unit: 4ea/2ea missing
ff. WDS/Washing Disk Stock: Missing
g-1. THC/Temperature and Humidity Controller: 1ea/ TEL OEM 2-CUP Shinwa T&H
Missing 4ea RKC controller
h-1. External Chemical Supply System:
aa. 1st. Section: Solvent Supply System
– Solvent Chemical type: 1ea.
– Chemical Center Supply System (CCSS) with 2 of 3liter Teflon Buffer Tank
– Tank Type: 2-Buffer tank (3liter tank, Teflon) to cover two coat units.
bb. 2nd. Section: Develop Supply System
– Develop Chemical type: 1ea.
– Chemical Center Supply System (CCSS) with 2 of 3liter Teflon Buffer Tank
– Tank Type: 2-Buffer tank (3liter tank, Teflon) to cover two DEV units.
i-1. HMDS Supply System for 2 AD Unit
– Chemical Type: 1ea
– Chemical 1/4gal. Bottle with 1L Buffer Tank
– Tank Auto Switch-off/Exchange: N/A
j-1. TEL OEM SMC Multi Controller: 1ea. @ rear main body
k-1. Power Transformer AC Cabinet: 208Vac, 3-Phase, 50/60Hz
4. Sales Condition
As-is/Where-is
Used Clean Track Mark 8 for sale. Tokyo Electron – TEL equipment & more
USED Manufacturer: Kobelco
Model: SK210
Used KOBELCO SK210 Excavator Original Made in Japan Machine Runs & Works Great 100% Work Ready Regularly maintained and serviced Low Hours Worked Model 90% New Good Engine Transmissions Hydraulics Track s No oil L…
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